PVD for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing
Ronald A. Powell and Stephen M. Rossnagel (Eds.)种类:
年:
1999
出版社:
Academic Press, Elsevier
语言:
english
页:
1
ISBN 10:
012533026X
ISBN 13:
9780125330268
系列:
Thin Films 26
文件:
PDF, 24.07 MB
IPFS:
,
english, 1999