Optical materials : microstructuring surfaces with off-electrode plasma
Nikolay L. Kazanskiy, Vsevolod A. KolpakovThis reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap. A new class of methods and devices that makes it possible to implement a series of processes for fabricating diffraction microstructures on large format wafers is also discussed.
种类:
年:
2017
出版:
1
出版社:
CRC Press
语言:
english
页:
229
ISBN 10:
1315279924
ISBN 13:
9781315279923
文件:
PDF, 7.00 MB
IPFS:
,
english, 2017